Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605530 | Plasma processing apparatus, data processing apparatus and data processing method | Seiichi Watanabe, Satomi Inoue, Kousuke Fukuchi | 2023-03-14 |
| 11569135 | Plasma processing method and wavelength selection method used in plasma processing | Yohei Kawaguchi, Tatehito Usui | 2023-01-31 |