Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781216 | Solid precursor feed system for thin film depositions | Alex Ignatiev | 2023-10-10 |
| 11584988 | Solid precursor feed system for thin film depositions | Alex Ignatiev | 2023-02-21 |