Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11713963 | Pattern shape evaluation device, pattern shape evaluation system, and pattern shape evaluation method | Atsuko Shintani, Takahiro Kawasaki, Kazuhisa Hasumi, Hiroki Kawada | 2023-08-01 |