Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11594428 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho, Soonam Park +2 more | 2023-02-28 |
ZW
Zilu Weng
Overall (2023): #181,409 of 537,848Top 35%
1
Patents 2023