Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830729 | Low-k boron carbonitride films | Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle | 2023-11-28 |
| 11756785 | Molecular layer deposition contact landing protection for 3D NAND | Bhaskar Jyoti Bhuyan, Susmit Singha Roy, Abhijit Basu Mallick | 2023-09-12 |
| 11732352 | Hydrogen free silicon dioxide | Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle | 2023-08-22 |
| 11682554 | Catalytic thermal deposition of carbon-containing materials | Bo Qi, Abhijit Basu Mallick | 2023-06-20 |
| 11658026 | Conformal silicon oxide film deposition | Bo Qi, Abhijit Basu Mallick | 2023-05-23 |
| 11655537 | HDP sacrificial carbon gapfill | Bo Qi, Abhijit Basu Mallick | 2023-05-23 |
| 11626278 | Catalytic formation of boron and carbon films | Bo Qi, Abhijit Basu Mallick | 2023-04-11 |
| 11545354 | Molecular layer deposition method and system | Bhaskar Jyoti Bhuyan, Bo Qi, Abhijit Basu Mallick, Xinke Wang, Mark Saly | 2023-01-03 |