Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11778721 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takayuki Yabu, Hiroaki Nakarai | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11778721 | Extreme ultraviolet light generation system and electronic device manufacturing method | Takayuki Yabu, Hiroaki Nakarai | 2023-10-03 |