Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11778721 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yuichi Nishimura, Hiroaki Nakarai | 2023-10-03 |
| 11553583 | Extreme ultraviolet light generation system and electronic device manufacturing method | Yoshifumi Ueno | 2023-01-10 |