Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569135 | Plasma processing method and wavelength selection method used in plasma processing | Yohei Kawaguchi, Shigeru Nakamoto | 2023-01-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569135 | Plasma processing method and wavelength selection method used in plasma processing | Yohei Kawaguchi, Shigeru Nakamoto | 2023-01-31 |