Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756804 | Platen shield cleaning system | Shantanu Rajiv Gadgil, Nathan Davis, Allen L. D'Ambra | 2023-09-12 |
| 11710630 | Plasma block with integrated cooling | Tanmay Pramod GURJAR, Sudhir Gondhalekar | 2023-07-25 |
| 11648645 | Pad conditioner cleaning system | Shantanu Rajiv Gadgil, Nathan Davis, Michael J. Coughlin, Allen L. D'Ambra | 2023-05-16 |
| 11610792 | Heated substrate support with thermal baffles | Fred Eric Ruhland | 2023-03-21 |
| 11545371 | Platen shield cleaning system | Shantanu Rajiv Gadgil, Nathan Davis, Allen L. D'Ambra | 2023-01-03 |