Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11746414 | Temperature control assembly for substrate processing apparatus and method of using same | Heechul Jung, YonJong Jeon | 2023-09-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11746414 | Temperature control assembly for substrate processing apparatus and method of using same | Heechul Jung, YonJong Jeon | 2023-09-05 |