Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11559869 | Wafer edge polishing apparatus and method | Makoto Ando, Tatsunori Izumi, Yuhei Matsunaga, Yasuo Yamada | 2023-01-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11559869 | Wafer edge polishing apparatus and method | Makoto Ando, Tatsunori Izumi, Yuhei Matsunaga, Yasuo Yamada | 2023-01-24 |