Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Chidambara A. Ramalingam, Shawyon Jafari, Moin Ahmed Khan, Kirubanandan Naina SHANMUGAM +5 more | 2023-12-19 |