Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11628565 | Substrate transport device and substrate transporting method | Hirofumi Minami, Takayuki Suzuki | 2023-04-18 |
| 11559889 | Substrate transport device and substrate transporting method | Hirofumi Minami, Takayuki Suzuki | 2023-01-24 |