Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604406 | Method and apparatus for fabrication of very large scale integration pattern features via electroless deposition on extreme ultraviolet lithography photomasks | Guojing Zhang, Yang Cao | 2023-03-14 |
| 11561466 | Monolithically framed pellicle membrane suitable for lithography in the fabrication of integrated circuits | Guojing Zhang | 2023-01-24 |