Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11566665 | Apparatus, system and method for an air bearing stage for component or devices | Jeroen Bosboom, Babak Naderi, Payman Rahimi, Michael McKenney, Kwok Yu +3 more | 2023-01-31 |