Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728187 | Method for decreasing cool down time with heated system for semiconductor manufacturing equipment | John F. Baggett | 2023-08-15 |
| 11670483 | High power wafer cooling | — | 2023-06-06 |