Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646226 | Method of tuning film properties of metal nitride using plasma | Wenyi Liu, Wei V. Tang, Srinivas Gandikota, Yixiong Yang, Yong Wu +2 more | 2023-05-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11646226 | Method of tuning film properties of metal nitride using plasma | Wenyi Liu, Wei V. Tang, Srinivas Gandikota, Yixiong Yang, Yong Wu +2 more | 2023-05-09 |