Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569420 | White light source and illumination apparatus for lighting in lithography process | Han Do Kim, Byung Soon Kim, Young-Sik Choi, Guen Ryeol Park, Yong Sun Choi | 2023-01-31 |