Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11634815 | Method, system, and device for storage and delivery of process gas from a substrate | Richard D. Blethen, Jeffrey J. Spiegelman, Russell J. Holmes, Daniel Alvarez, Jr., Jian Yang | 2023-04-25 |
| 11634816 | Method, system, and device for storage and delivery of process gas from a substrate | Richard D. Blethen, Jeffrey J. Spiegelman, Russell J. Holmes, Daniel Alvarez, Jr., Jian Yang | 2023-04-25 |
| 11635170 | Method, system, and device for storage and delivery of process gas from a substrate | Richard D. Blethen, Jeffrey J. Spiegelman, Russell J. Holmes, Daniel Alvarez, Jr., Jian Yang | 2023-04-25 |