Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11649559 | Method of utilizing a degassing chamber to reduce arsenic outgassing following deposition of arsenic-containing material on a substrate | Xinyu BAO, Hua Chung, Schubert S. Chu | 2023-05-16 |
| 11651977 | Processing of workpieces using fluorocarbon plasma | Shanyu Wang | 2023-05-16 |