Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11661650 | Yttrium oxide based coating composition | Vahid Firouzdor, Hyun-Ho Doh, Joseph Behnke, Joseph F. Sommers | 2023-05-30 |
| D984895 | Packaging insert for a process chamber component | Joseph Behnke, Trevor Edward Wilantewicz, Timothy Douglas Toth, Scott Osterman | 2023-05-02 |