Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699571 | Semiconductor processing chambers for deposition and etch | Khokan Chandra Paul, Ravikumar Patil, Vijet Patil, Carlaton WONG, Adam J. Fischbach +2 more | 2023-07-11 |
| 11581408 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Bernard L. Hwang, Jeffrey Tobin +2 more | 2023-02-14 |