Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621171 | Method for polishing silicon wafer with reduced wear on carrier, and polishing liquid used therein | Hayato Yamaguchi, Yusuke Tanatsugu | 2023-04-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621171 | Method for polishing silicon wafer with reduced wear on carrier, and polishing liquid used therein | Hayato Yamaguchi, Yusuke Tanatsugu | 2023-04-04 |