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— |
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Guannan Liu, Akm A. Ahsan, Mark Armstrong |
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Method of forming stacked trench contacts and structures formed thereby |
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Method for making memory cells based on thin-film transistors |
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Intermediate separation layers at the back-end-of-line |
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Capacitor separations in dielectric layers |
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Method of contact patterning of thin film transistors for embedded DRAM using a multi-layer hardmask |
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