Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835710 | Method of mode coupling detection and damping and usage for electrostatic MEMS mirrors | David Brunner, Franz Michael Darrer, Georg Schitter, Richard SCHROEDTER, Han Woong Yoo | 2023-12-05 |
| 11703681 | MEMS devices comprising spring element and comb drive and associated production methods | Marten Oldsen | 2023-07-18 |