Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11599019 | Method for forming an extreme ultraviolet lithography pellicle | Marina Timmermans, Ivan Pollentier, Elie Schapmans, Emily Gallagher | 2023-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11599019 | Method for forming an extreme ultraviolet lithography pellicle | Marina Timmermans, Ivan Pollentier, Elie Schapmans, Emily Gallagher | 2023-03-07 |