Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827975 | Photoplasma etching apparatus having improved plasma-resistant and manufacturing method therefor using a thermal diffusion phenomenon of a rare-earth metal thin film | Suntae KIM, Donghun JEONG | 2023-11-28 |
| 11795547 | Method of aerosol deposition coating for plasma resistant coating | Dae Hoon JANG, Dong-Joo Kim, Sang Gyu Park, Jin-Soo Park | 2023-10-24 |