Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827246 | Vehicle control device, vehicle control method, and storage medium | Takao Tamura, Daichi Inoue | 2023-11-28 |
| 11728184 | Drying module, substrate processing module and method of drying substrate holder | — | 2023-08-15 |