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Takehiro Hirai

HHHitachi High-Technologies: 1 patents #104 of 389Top 30%
Overall (2023): #237,018 of 537,848Top 45%
1 Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11670528 Wafer observation apparatus and wafer observation method Naoaki KONDO, Minoru Harada, Yohei Minekawa 2023-06-06

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