Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664185 | Vibration damping system for charged particle beam apparatus | Jun Etoh, Hironori Ogawa, Terunobu Funatsu | 2023-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11664185 | Vibration damping system for charged particle beam apparatus | Jun Etoh, Hironori Ogawa, Terunobu Funatsu | 2023-05-30 |