Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11675277 | Self-referencing and self-calibrating interference pattern overlay measurement | Dongyue Yang, Xintuo Dai, Dongsuk Park, Minghao Tang, Pavan Kumar Chinthamanipeta Sripadarao +1 more | 2023-06-13 |