Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826852 | Laser processing apparatus, laser processing system, and laser processing method | Akira SUWA, Masashi SHIMBORI, Masakazu Kobayashi | 2023-11-28 |
| 11822324 | Machine learning method, consumable management apparatus, and computer readable medium | Kunihiko ABE, Yuji MINEGISHI, Satoru Kikuchi | 2023-11-21 |
| 11804697 | Laser system and electronic device manufacturing method | Taisuke Miura | 2023-10-31 |
| 11768362 | Laser radiation system and method for manufacturing electronic device | Akiyoshi Suzuki | 2023-09-26 |
| 11764541 | Laser system and method for manufacturing electronic device | Taisuke Miura, Hironori IGARASHI | 2023-09-19 |
| 11710660 | Laser irradiation method and laser irradiation system | Hiroshi Ikenoue, Hiroaki Oizumi, Akira SUWA | 2023-07-25 |
| 11614572 | Mirror for extreme ultraviolet light and extreme ultraviolet light generating apparatus | Yoshiyuki Honda | 2023-03-28 |
| 11604416 | Laser processing method and laser processing system | Koji Kakizaki, Masakazu Kobayashi, Akira SUWA | 2023-03-14 |