Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11761084 | Substrate processing apparatus and method of processing substrate | Hiroki Arai, Yuya Nonaka | 2023-09-19 |
| 11600503 | High-throughput, multi-chamber substrate processing system | — | 2023-03-07 |