Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11744158 | Ferroelectric material, MEMS component comprising a ferroelectric material, MEMS device comprising a first MEMS component, method of producing a MEMS component, and method of producing a CMOS-compatible MEMS component | Bernhard Wagner, Fabian LOFINK, Dirk KADEN | 2023-08-29 |
| 11672127 | Ferroelectric semiconductor device and method for producing a memory cell | Bernhard Wagner, Fabian LOFINK | 2023-06-06 |