Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848179 | Methods of and apparatus for magnetron sputtering | Claudiu Valentin Falub, Martin Bless | 2023-12-19 |
| 11551950 | Substrate processing apparatus and method of processing a substrate and of manufacturing a processed workpiece | Heinz Felzer, Dominik Jaeger, Hubert Breuss | 2023-01-10 |