Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848216 | Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assembly | Takayuki Kajikawa, Masayoshi Imai | 2023-12-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848216 | Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assembly | Takayuki Kajikawa, Masayoshi Imai | 2023-12-19 |