Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837482 | Substrate holding and rotation mechanism and substrate processing apparatus | — | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837482 | Substrate holding and rotation mechanism and substrate processing apparatus | — | 2023-12-05 |