Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852472 | Output signal processing circuit for eddy current sensor and output signal processing method for eddy current sensor | Hiroto Yamada, Taro Takahashi, Hiroaki Shibue, Atsushi Abe | 2023-12-26 |
| 11731233 | Eddy current detection device and polishing apparatus | Taro Takahashi, Hiroaki Shibue | 2023-08-22 |
| 11633828 | Substrate polishing system, substrate polishing method and substrate polishing apparatus | Yuta Suzuki, Taro Takahashi, Akihiko Ogawa, Shigeyuki Furuya, Yuji Yagi +1 more | 2023-04-25 |