Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735457 | Substrate processing apparatus and substrate processing method | Hozumi Yasuda | 2023-08-22 |
| 11633828 | Substrate polishing system, substrate polishing method and substrate polishing apparatus | Yuta Suzuki, Taro Takahashi, Akihiko Ogawa, Shigeyuki Furuya, Yuji Yagi +1 more | 2023-04-25 |