Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11673224 | Light transmitting member, polishing pad, and substrate polishing apparatus | Sachiko Takeda, Chikako Koyama | 2023-06-13 |
| 11642753 | Polishing-pad laminated structure, polishing-pad positioning instrument, and method of attaching a polishing pad to a polishing table | Toshikazu Nomura, Nobuyuki Takahashi, Suguru Sakugawa, Takashi Kishi | 2023-05-09 |