Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731241 | Substrate rotation device, substrate cleaning device, substrate processing device, and control method for substrate rotation device | Toshimitsu Barada | 2023-08-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731241 | Substrate rotation device, substrate cleaning device, substrate processing device, and control method for substrate rotation device | Toshimitsu Barada | 2023-08-22 |