Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11827650 | Method of manufacturing ruthenium-containing thin film and ruthenium-containing thin film manufactured therefrom | Myong Woon Kim, Sung Woo Cho, Mi Jeong HAN, Haeng Don LIM | 2023-11-28 |
| 11749522 | Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin using the same | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Byeong-il YANG +3 more | 2023-09-05 |