Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11749522 | Composition for depositing silicon-containing thin film containing bis(aminosilyl)alkylamine compound and method for manufacturing silicon-containing thin using the same | Sung-Gi Kim, Jeong Joo PARK, Joong Jin PARK, Se Jin JANG, Byeong-il YANG +3 more | 2023-09-05 |