Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11618106 | Processing method and laser processing apparatus including imaging detector for SiC ingot | Shin Tabata | 2023-04-04 |
| 11597039 | Wafer producing method and laser processing apparatus | Ryohei Yamamoto | 2023-03-07 |