Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11758641 | Power supply system for improving plasma uniformity and method thereof | Kai Zhao, Zixuan Su, Yongxin Liu | 2023-09-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11758641 | Power supply system for improving plasma uniformity and method thereof | Kai Zhao, Zixuan Su, Yongxin Liu | 2023-09-12 |