Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11803126 | Method of compensating wavelength error induced by repetition rate deviation | Kuo-Tai Teng | 2023-10-31 |
| 11754541 | Fluorine detection in a gas discharge light source | Joshua Jon Thornes, Edward Siqi Luo, Gamaralalage G. Padmabandu | 2023-09-12 |