Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846887 | Prolonging optical element lifetime in an EUV lithography system | Yue Ma, Antonius Theodorus Wilhelmus Kempen, Klaus Hummler, Johannes Hubertus Josephina Moors, Jeroen Hubert Rommers +20 more | 2023-12-19 |
| 11822252 | Guiding device and associated system | Dzmitry Labetski, Christianus Wilhelmus Johannes Berendsen, Rui Miguel Duarte Rodreigues Nunes, Kornelis Frits Feenstra, Igor V. Fomenkov +13 more | 2023-11-21 |
| 11690159 | Apparatus and method for extending target material delivery system lifetime | Bob Rollinger, Georgiy O. Vaschenko, Chirag Rajyaguru, Joshua Mark Lukens, Mathew Abraham | 2023-06-27 |