Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823890 | Multiple zone heater | Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Alexander Veytser | 2023-11-21 |
| 11712745 | Semiconductor substrate support with multiple electrodes and method for making same | Michael Parker, Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster +1 more | 2023-08-01 |