Showing 1–8 of 8 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Sebastian Thomas Bauerschmidt | Asml Netherlands B.V. | 10 |
| 2 | Siegfried Stengel | Leonhard Kurz Stiftung & Co. Kg | 1 |
| 2 | Stephan Wilde | Fraunhofer | 1 |
| 2 | Cornelia Ernst | Puma Se | 1 |
| 2 | Andreas Fröhlich | Software Gmbh | 1 |
| 2 | Richard Silberhorn | Ebm-Papst St. Georgen | 1 |
| 2 | Udo Heckel | Siemens Aktiengesellschaft | 1 |
| 2 | Alexander Wahl | Siemens Aktiengesellschaft | 1 |