Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834278 | Article transport vehicle | Kazuharu Yoshinaga | 2023-12-05 |
| 11699601 | Substrate processing method | Tomohiro Takahashi, Kei TAKECHI, Mitsutoshi SASAKI | 2023-07-11 |
| 11561958 | Information processing device and information processing system | — | 2023-01-24 |